Title Handbook of thin film deposition: Techniques, Process, and Technologies Author(s) Krishna Seshan (ed.) Edition 3rd. Publication Amsterdam, Elsevier Science Publishers, 2012. Description xviii, 392p. Abstract Note The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. ISBN,Price 9781437778731 : US $199.00(HB) Classification 539.216.2(026) Keyword(s) 1. EBOOK 2. EBOOK - ELSEVIER 3. THIN FILM DEPOSITION 4. THIN FILMS Item Type Book Multi-Media Links Please Click here for eBook Circulation Data Accession#   Call# Status Issued To Return Due On Physical Location 025024   539.216.2(026)/SES/025024  On Shelf     OB1404   539.216.2(026)/SES/  On Shelf     +Copy Specific Information