TitleExcimer laser technology
Author(s)D. Basting (ed.);G. Marowsky (ed.)
PublicationBerlin, Springer/Praxis, 2005.
Description1 online resource (xix, 433 p.) : ill
Abstract Note"This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F[subscript 2] laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook." "A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology."--Jacket
NotesIncludes bibliographical references and index
Keyword(s)1. EBOOK 2. EBOOK - SPRINGER 3. Excimer lasers 4. LASER 5. TECHNOLOGY & ENGINEERING
Item TypeeBook
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Circulation Data
Accession#  Call#StatusIssued ToReturn Due On Physical Location
I00611     On Shelf