TitleAdvanced materials and technologies for micro/nano-devices, sensors and actuators : Proceedings of the NATO Advanced Research Worskhop on Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Author(s)Evgeni Gusev (ed.);Eric Garfunkel (ed.);Arthur Dideikin (ed.)
PublicationDordrecht, Springer, 2010.
Description1 online resource (322 p.)
Abstract Note"The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who have contributed to the book represent a diverse group of leading scientists from academic, industrial and governmental labs worldwide who bring a broad array of backgrounds such as device physics, technologists, electrical and mechanical engineering, surface chemistry and materials science). The contributions to this book are accessible to both expert scientists and engineers who need to keep up with leading edge research, and newcomers to the field who wish to learn more about the exciting basic and applied research issues relevant to micromechanical devices and technologies."--Jacket
Keyword(s)1. EBOOK 2. EBOOK - SPRINGER 3. Microelectromechanical systems
Item TypeeBook
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Accession#  Call#StatusIssued ToReturn Due On Physical Location
I01358     On Shelf