TitlePhysics of Submicron Devices
Author(s)Ferry, David K;Grondin, Robert O
PublicationNew York, NY, Springer US, 1991.
DescriptionXIII, 402 p : online resource
Abstract NoteThe purposes of this book are many. First, we must point out that it is not a device book, as a proper treatment of the range of important devices would require a much larger volume even without treating the important physics for submicron devices. Rather, the book is written principally to pull together and present in a single place, and in a (hopefully) uniform treatment, much of the understanding on relevant physics for submicron devices. Indeed, the understand?? ing that we are trying to convey through this work has existed in the literature for quite some time, but has not been brought to the full attention of those whose business is the making of submicron devices. It should be remarked that much of the important physics that is discussed here may not be found readily in devices at the 1.0-JLm level, but will be found to be dominant at the O.I-JLm level. The range between these two is rapidly being covered as technology moves from the 256K RAM to the 16M RAM chips
ISBN,Price9781461532842
Keyword(s)1. CONDENSED MATTER 2. CONDENSED MATTER PHYSICS 3. CRYSTALLOGRAPHY 4. Crystallography and Scattering Methods 5. EBOOK 6. EBOOK - SPRINGER 7. ELECTRICAL ENGINEERING 8. Electronic materials 9. MICROSCOPY 10. Optical and Electronic Materials 11. OPTICAL MATERIALS 12. SOLID STATE PHYSICS 13. SPECTROSCOPY 14. Spectroscopy and Microscopy
Item TypeeBook
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