Title Ellipsometry for Industrial Applications Author(s) Riedling, Karl Publication Vienna, Springer Vienna, 1988. Description XIII, 99 p. 49 illus : online resource Abstract Note During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic "in situ" measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion of various error effects typical particularly for simple ellipsometers and of their impact on measured sample parameters is provided. Error correction or (numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic "in situ" measurements are suggested ISBN,Price 9783709189610 Keyword(s) 1. EBOOK 2. EBOOK - SPRINGER 3. Electronic materials 4. ELECTRONICS 5. Electronics and Microelectronics, Instrumentation 6. LASERS 7. Materials???Surfaces 8. MICROELECTRONICS 9. MICROSCOPY 10. Optical and Electronic Materials 11. OPTICAL MATERIALS 12. Optics, Lasers, Photonics, Optical Devices 13. PHOTONICS 14. SOLID STATE PHYSICS 15. SPECTROSCOPY 16. Spectroscopy and Microscopy 17. Surfaces and Interfaces, Thin Films 18. THIN FILMS Item Type eBook Multi-Media Links Please Click here for eBook Circulation Data Accession#   Call# Status Issued To Return Due On Physical Location I02086     On Shelf