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| Title | The Physics of Micro/Nano-Fabrication |
| Author(s) | Brodie, Ivor;Muray, Julius J |
| Publication | New York, NY, Springer US, 1992. |
| Description | XX, 622 p : online resource |
| Abstract Note | In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references |
| ISBN,Price | 9781475767759 |
| Keyword(s) | 1. CONDENSED MATTER
2. CONDENSED MATTER PHYSICS
3. CRYSTALLOGRAPHY
4. Crystallography and Scattering Methods
5. EBOOK
6. EBOOK - SPRINGER
7. ELECTRICAL ENGINEERING
8. Electronic materials
9. MICROSCOPY
10. Optical and Electronic Materials
11. OPTICAL MATERIALS
12. SOLID STATE PHYSICS
13. SPECTROSCOPY
14. Spectroscopy and Microscopy
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| Item Type | eBook |
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Circulation Data
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Call# | Status | Issued To | Return Due On | Physical Location |
| I02380 |
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