Title Low-Energy Ion Irradiation of Solid Surfaces Author(s) Gnaser, Hubert Publication Berlin, Heidelberg, Springer Berlin Heidelberg, 1999. Description VIII, 294 p. 69 illus., 9 illus. in color : online resource Abstract Note The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches ISBN,Price 9783540497738 Keyword(s) 1. Atomic, Molecular, Optical and Plasma Physics 2. ATOMS 3. Characterization and Evaluation of Materials 4. EBOOK 5. EBOOK - SPRINGER 6. MATERIALS SCIENCE 7. Materials???Surfaces 8. PHYSICAL CHEMISTRY 9. PHYSICS 10. Surfaces and Interfaces, Thin Films 11. THIN FILMS Item Type eBook Multi-Media Links Please Click here for eBook Circulation Data Accession#   Call# Status Issued To Return Due On Physical Location I02766     On Shelf