TitleScanning Electron Microscopy : Physics of Image Formation and Microanalysis
Author(s)Reimer, Ludwig
PublicationBerlin, Heidelberg, Springer Berlin Heidelberg, 1985.
DescriptionXVIII, 463 p. 243 illus : online resource
Abstract NoteThe aim of this book is to outline the physics of image formation, electron?? specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of M??nster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron?? specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the elec?? tron beam can be blanked at high frequencies for time-resolving exper?? iments and what problems have tobe taken into account when focusing
ISBN,Price9783662135624
Keyword(s)1. EBOOK 2. EBOOK - SPRINGER 3. MICROSCOPY 4. SOLID STATE PHYSICS 5. SPECTROSCOPY 6. Spectroscopy and Microscopy
Item TypeeBook
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I02910     On Shelf