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| Title | Rapid Thermal Processing of Semiconductors |
| Author(s) | Borisenko, Victor E;Hesketh, Peter J |
| Publication | New York, NY, Springer US, 1997. |
| Description | XXII, 358 p : online resource |
| Abstract Note | Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field |
| ISBN,Price | 9781489918048 |
| Keyword(s) | 1. EBOOK
2. EBOOK - SPRINGER
3. Electronic materials
4. MICROSCOPY
5. Optical and Electronic Materials
6. OPTICAL MATERIALS
7. SOLID STATE PHYSICS
8. SPECTROSCOPY
9. Spectroscopy and Microscopy
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| Item Type | eBook |
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Circulation Data
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Call# | Status | Issued To | Return Due On | Physical Location |
| I03232 |
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