TitleScanning Electron Microscopy : Physics of Image Formation and Microanalysis
Author(s)Reimer, Ludwig
PublicationBerlin, Heidelberg, Springer Berlin Heidelberg, 1998.
DescriptionXIV, 529 p : online resource
Abstract NoteScanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information
ISBN,Price9783540389675
Keyword(s)1. EBOOK 2. EBOOK - SPRINGER 3. Interfaces (Physical sciences) 4. MICROSCOPY 5. PHYSICS 6. Physics, general 7. SOLID STATE PHYSICS 8. SPECTROSCOPY 9. Spectroscopy and Microscopy 10. Surface and Interface Science, Thin Films 11. Surfaces (Physics) 12. THIN FILMS
Item TypeeBook
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