Title Sputtering by Particle Bombardment : Experiments and Computer Calculations from Threshold to MeV Energies Author(s) Behrisch, Rainer;Eckstein, Wolfgang Publication Berlin, Heidelberg, Springer Berlin Heidelberg, 2007. Description XVII, 509 p : online resource Abstract Note This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and their dependence on the incident energy and angle of incidence, as well as the energy and angular distributions of the sputtered atoms are presented. This concerns experimentally determined yields as well as a critical evaluation of the computational methods used to calculate the yields and distributions. The energies of the incident ions cover the range between a few eV up to several MeV. The influence of chemical effects between the incident ions and the atoms of the bombarded solid on the sputtering yields are also reviewed ISBN,Price 9783540445029 Keyword(s) 1. ATOMS 2. Atoms and Molecules in Strong Fields, Laser Matter Interaction 3. EBOOK 4. EBOOK - SPRINGER 5. Materials???Surfaces 6. PHYSICS 7. PLASMA (IONIZED GASES) 8. PLASMA PHYSICS 9. Surfaces and Interfaces, Thin Films 10. THIN FILMS Item Type eBook Multi-Media Links Please Click here for eBook Circulation Data Accession#   Call# Status Issued To Return Due On Physical Location I06420     On Shelf