Title Photomodulated Optical Reflectance : A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon Author(s) Bogdanowicz, Janusz Publication Berlin, Heidelberg, Springer Berlin Heidelberg, 2012. Description XXIV, 204 p : online resource Abstract Note One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation ISBN,Price 9783642301087 Keyword(s) 1. Applied and Technical Physics 2. EBOOK 3. EBOOK - SPRINGER 4. PHYSICS 5. SEMICONDUCTORS Item Type eBook Multi-Media Links Please Click here for eBook Circulation Data Accession#   Call# Status Issued To Return Due On Physical Location I06443     On Shelf