TitleMetal-Dielectric Interfaces in Gigascale Electronics : Thermal and Electrical Stability
Author(s)He, Ming;Lu, Toh-Ming
PublicationNew York, NY, Springer New York, 2012.
DescriptionXI, 149 p. 120 illus., 48 illus. in color : online resource
Abstract NoteMetal-dielectric interfaces are ubiquitous in modern electronics. As advanced gigascale electronic devices continue to shrink, the stability of these interfaces is becoming an increasingly important issue that has a profound impact on the operational reliability of these devices. In this book, the authors present the basic science underlying ??the thermal and electrical stability of metal-dielectric interfaces and its relationship to the operation of advanced interconnect systems in gigascale electronics. Interface phenomena, including chemical reactions between metals and dielectrics, metallic-atom diffusion, and ion drift, are discussed based on fundamental physical and chemical principles. Schematic diagrams are provided throughout the book to illustrate ??interface phenomena and the principles that govern them. Metal-Dielectric Interfaces in Gigascale Electronics ??provides a unifying approach to the diverse and sometimes contradictory test results that are reported in the literature on metal-dielectric interfaces. The goal is to provide readers with a clear account of the relationship between interface science and its applications in interconnect structures. The material presented here will also be of interest to those engaged in field-effect transistor and memristor device research, as well as university researchers and industrial scientists working in the areas of electronic materials processing, semiconductor manufacturing, memory chips, and IC design.???? Presents a unified approach to understanding the diverse phenomena observed at metal-dielectric interfaces Features fundamental considerations in the physics and chemistry of metal-dielectric interactions Explores mechanisms of metal atom diffusion and metal ion drift in dielectrics Provides keys to understanding reliability in gigascale electronics Focuses on a dynamic area of current research that is a foundation??of future interconnect systems, memristors, and solid-state electrolyte devices Presents a unified approach to understanding the diverse phenomena observed at metal-dielectric interfaces
ISBN,Price9781461418122
Keyword(s)1. EBOOK 2. EBOOK - SPRINGER 3. Electrochemistry 4. Electronic materials 5. ELECTRONICS 6. Electronics and Microelectronics, Instrumentation 7. Engineering Thermodynamics, Heat and Mass Transfer 8. Heat engineering 9. HEAT TRANSFER 10. Interfaces (Physical sciences) 11. MASS TRANSFER 12. MICROELECTRONICS 13. NANOTECHNOLOGY 14. Nanotechnology and Microengineering 15. Optical and Electronic Materials 16. OPTICAL MATERIALS 17. Surface and Interface Science, Thin Films 18. Surfaces (Physics) 19. THERMODYNAMICS 20. THIN FILMS
Item TypeeBook
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