Title Rare-Earth Implanted MOS Devices for Silicon Photonics : Microstructural, Electrical and Optoelectronic Properties Author(s) Rebohle, Lars;Skorupa, Wolfgang Publication Berlin, Heidelberg, Springer Berlin Heidelberg, 2010. Description XVIII, 174 p. 120 illus., 3 illus. in color : online resource Abstract Note The book concentrates on the microstructural, electric and optoelectronic properties of rare-earth implanted MOS structures and their use as light emitters in potential applications. It describes the structural formation processes in the gate oxide during fabrication and under operation, how this microstructure development will affect the electrical device performance and how both microstructure and electrical characteristics determine the optoelectronic features of the light emitters. However, most of the discussed physical processes as well as the described fabrication methods and device characterization techniques are of general interest and are beyond the scope of this type of light emitter. The book will be of value to engineers, physicists, and scientists dealing either with Si based photonics in particular or optoelectronic device fabrication and characterization in general ISBN,Price 9783642144479 Keyword(s) 1. EBOOK 2. EBOOK - SPRINGER 3. Electronic materials 4. Optical and Electronic Materials 5. OPTICAL MATERIALS Item Type eBook Multi-Media Links Please Click here for eBook Circulation Data Accession#   Call# Status Issued To Return Due On Physical Location I07173     On Shelf