TitleExcimer Laser Technology
Author(s)Basting, Dirk;Marowsky, Gerd
PublicationBerlin, Heidelberg, Springer Berlin Heidelberg, 2005.
DescriptionXX, 433 p : online resource
Abstract NoteThis comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology
ISBN,Price9783540266679
Keyword(s)1. EBOOK 2. EBOOK - SPRINGER 3. ENGINEERING 4. Engineering, general 5. LASERS 6. Measurement Science and Instrumentation 7. Measurement?????? 8. Optics, Lasers, Photonics, Optical Devices 9. PHOTONICS 10. PHYSICAL CHEMISTRY 11. PHYSICAL MEASUREMENTS
Item TypeeBook
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Accession#  Call#StatusIssued ToReturn Due On Physical Location
I08431     On Shelf