TitleRadiation Effects in Advanced Semiconductor Materials and Devices
Author(s)Claeys, C;Simoen, E
PublicationBerlin, Heidelberg, Springer Berlin Heidelberg, 2002.
DescriptionXXII, 404 p : online resource
Abstract NoteIn the modern semiconductor industry, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today's device and circuit fabrication rely on increasing numbers of processing steps that involve an aggressive environment where inadvertant radiation damage can occur. This book is both aimed at post-graduate researchers seeking an overview of the field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts are all briefly summarized. Finally the book outlines the shortcomings of present experimental and modeling techniques and gives an outlook on future developments
ISBN,Price9783662049747
Keyword(s)1. Characterization and Evaluation of Materials 2. CLASSICAL ELECTRODYNAMICS 3. CRYSTALLOGRAPHY 4. Crystallography and Scattering Methods 5. EBOOK 6. EBOOK - SPRINGER 7. ELECTRODYNAMICS 8. Electronic materials 9. Energy and state 10. Energy policy 11. Energy Policy, Economics and Management 12. MATERIALS SCIENCE 13. Materials???Surfaces 14. Optical and Electronic Materials 15. OPTICAL MATERIALS 16. OPTICS 17. Surfaces and Interfaces, Thin Films 18. THIN FILMS
Item TypeeBook
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