TitleElectron-Beam Interactions with Solids : Application of the Monte Carlo Method to Electron Scattering Problems
Author(s)Dapor, Maurizio
PublicationBerlin, Heidelberg, Springer Berlin Heidelberg, 2003.
DescriptionX, 110 p : online resource
Abstract NoteThe interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data
ISBN,Price9783540365075
Keyword(s)1. Atomic, Molecular, Optical and Plasma Physics 2. ATOMS 3. CONDENSED MATTER 4. CONDENSED MATTER PHYSICS 5. EBOOK 6. EBOOK - SPRINGER 7. Electronic materials 8. Materials???Surfaces 9. MATHEMATICAL PHYSICS 10. Optical and Electronic Materials 11. OPTICAL MATERIALS 12. Particle acceleration 13. Particle Acceleration and Detection, Beam Physics 14. PHYSICS 15. Surfaces and Interfaces, Thin Films 16. Theoretical, Mathematical and Computational Physics 17. THIN FILMS
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Accession#  Call#StatusIssued ToReturn Due On Physical Location
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