TitleDIY MEMS : Fabricating Microelectromechanical Systems in Open Use Labs
Author(s)Munro, Deborah
PublicationCham, Springer International Publishing, 2019.
DescriptionXVI, 188 p. 19 illus., 4 illus. in color : online resource
Abstract NoteThis book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. Introduces the MEMS fabrication processes and equipment Explains how to take the first steps - where to start and get initial advice and further assistance Includes a global list of MEMS facilities and resources with contact information
ISBN,Price9783030330736
Keyword(s)1. Biomedical engineering 2. Biomedical Engineering/Biotechnology 3. EBOOK 4. EBOOK - SPRINGER 5. ELECTRONIC CIRCUITS 6. Electronic Circuits and Devices 7. ELECTRONICS 8. Electronics and Microelectronics, Instrumentation 9. Industrial and Production Engineering 10. Industrial engineering 11. MICROELECTRONICS 12. NANOTECHNOLOGY 13. Nanotechnology and Microengineering 14. Production engineering
Item TypeeBook
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Accession#  Call#StatusIssued ToReturn Due On Physical Location
I08696     On Shelf