Title Laser Heat-Mode Lithography : Principle and Methods Author(s) Wei, Jingsong Publication Singapore, Springer Singapore, 2019. Description XIII, 208 p. 182 illus., 160 illus. in color : online resource Abstract Note This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size. Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc ISBN,Price 9789811509438 Keyword(s) 1. EBOOK 2. EBOOK - SPRINGER 3. Electronic materials 4. Interfaces (Physical sciences) 5. LASERS 6. MICROWAVES 7. Microwaves, RF and Optical Engineering 8. Optical and Electronic Materials 9. OPTICAL ENGINEERING 10. OPTICAL MATERIALS 11. Optics, Lasers, Photonics, Optical Devices 12. PHOTONICS 13. Surface and Interface Science, Thin Films 14. Surfaces (Physics) 15. THIN FILMS Item Type eBook Multi-Media Links Please Click here for eBook Circulation Data Accession#   Call# Status Issued To Return Due On Physical Location I09317     On Shelf