| |
| Title | Flash Lamp Annealing : From Basics to Applications |
| Author(s) | Rebohle, Lars;Prucnal, Slawomir;Reichel, Denise |
| Publication | Cham, Springer International Publishing, 2019. |
| Description | XVIII, 288 p : online resource |
| Abstract Note | This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users |
| ISBN,Price | 9783030232993 |
| Keyword(s) | 1. EBOOK
2. EBOOK - SPRINGER
3. Electronic materials
4. LASERS
5. Manufactures
6. Manufacturing, Machines, Tools, Processes
7. MICROWAVES
8. Microwaves, RF and Optical Engineering
9. NANOTECHNOLOGY
10. Nanotechnology and Microengineering
11. Optical and Electronic Materials
12. OPTICAL ENGINEERING
13. OPTICAL MATERIALS
14. Optics, Lasers, Photonics, Optical Devices
15. PHOTONICS
16. SEMICONDUCTORS
|
| Item Type | eBook |
Multi-Media Links
Please Click here for eBook
Circulation Data
| Accession# | |
Call# | Status | Issued To | Return Due On | Physical Location |
| I09472 |
|
|
On Shelf |
|
|
|
|