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Click the serial number on the left to view the details of the item. |
| # |
Author | Title | Accn# | Year | Item Type | Claims |
| 1 |
Rebohle, Lars |
Flash Lamp Annealing |
I09472 |
2019 |
eBook |
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| 2 |
Rebohle, Lars |
Rare-Earth Implanted MOS Devices for Silicon Photonics |
I07173 |
2010 |
eBook |
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1.
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| Title | Flash Lamp Annealing : From Basics to Applications |
| Author(s) | Rebohle, Lars;Prucnal, Slawomir;Reichel, Denise |
| Publication | Cham, Springer International Publishing, 2019. |
| Description | XVIII, 288 p : online resource |
| Abstract Note | This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users |
| ISBN,Price | 9783030232993 |
| Keyword(s) | 1. EBOOK
2. EBOOK - SPRINGER
3. Electronic materials
4. LASERS
5. Manufactures
6. Manufacturing, Machines, Tools, Processes
7. MICROWAVES
8. Microwaves, RF and Optical Engineering
9. NANOTECHNOLOGY
10. Nanotechnology and Microengineering
11. Optical and Electronic Materials
12. OPTICAL ENGINEERING
13. OPTICAL MATERIALS
14. Optics, Lasers, Photonics, Optical Devices
15. PHOTONICS
16. SEMICONDUCTORS
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| Item Type | eBook |
Multi-Media Links
Please Click here for eBook
Circulation Data
| Accession# | |
Call# | Status | Issued To | Return Due On | Physical Location |
| I09472 |
|
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On Shelf |
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2.
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| Title | Rare-Earth Implanted MOS Devices for Silicon Photonics : Microstructural, Electrical and Optoelectronic Properties |
| Author(s) | Rebohle, Lars;Skorupa, Wolfgang |
| Publication | Berlin, Heidelberg, Springer Berlin Heidelberg, 2010. |
| Description | XVIII, 174 p. 120 illus., 3 illus. in color : online resource |
| Abstract Note | The book concentrates on the microstructural, electric and optoelectronic properties of rare-earth implanted MOS structures and their use as light emitters in potential applications. It describes the structural formation processes in the gate oxide during fabrication and under operation, how this microstructure development will affect the electrical device performance and how both microstructure and electrical characteristics determine the optoelectronic features of the light emitters. However, most of the discussed physical processes as well as the described fabrication methods and device characterization techniques are of general interest and are beyond the scope of this type of light emitter. The book will be of value to engineers, physicists, and scientists dealing either with Si based photonics in particular or optoelectronic device fabrication and characterization in general |
| ISBN,Price | 9783642144479 |
| Keyword(s) | 1. EBOOK
2. EBOOK - SPRINGER
3. Electronic materials
4. Optical and Electronic Materials
5. OPTICAL MATERIALS
|
| Item Type | eBook |
Multi-Media Links
Please Click here for eBook
Circulation Data
| Accession# | |
Call# | Status | Issued To | Return Due On | Physical Location |
| I07173 |
|
|
On Shelf |
|
|
|
| |