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Click the serial number on the left to view the details of the item. |
| # |
Author | Title | Accn# | Year | Item Type | Claims |
| 1 |
Wei, Jingsong |
Laser Heat-Mode Lithography |
I09317 |
2019 |
eBook |
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| 2 |
Wei, Jingsong |
Nonlinear Super-Resolution Nano-Optics and Applications |
I07633 |
2015 |
eBook |
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| Title | Laser Heat-Mode Lithography : Principle and Methods |
| Author(s) | Wei, Jingsong |
| Publication | Singapore, Springer Singapore, 2019. |
| Description | XIII, 208 p. 182 illus., 160 illus. in color : online resource |
| Abstract Note | This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size. Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc |
| ISBN,Price | 9789811509438 |
| Keyword(s) | 1. EBOOK
2. EBOOK - SPRINGER
3. Electronic materials
4. Interfaces (Physical sciences)
5. LASERS
6. MICROWAVES
7. Microwaves, RF and Optical Engineering
8. Optical and Electronic Materials
9. OPTICAL ENGINEERING
10. OPTICAL MATERIALS
11. Optics, Lasers, Photonics, Optical Devices
12. PHOTONICS
13. Surface and Interface Science, Thin Films
14. Surfaces (Physics)
15. THIN FILMS
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| Item Type | eBook |
Multi-Media Links
Please Click here for eBook
Circulation Data
| Accession# | |
Call# | Status | Issued To | Return Due On | Physical Location |
| I09317 |
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On Shelf |
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2.
 | |
| Title | Nonlinear Super-Resolution Nano-Optics and Applications |
| Author(s) | Wei, Jingsong |
| Publication | Berlin, Heidelberg, Springer Berlin Heidelberg, 2015. |
| Description | XI, 256 p. 176 illus., 48 illus. in color : online resource |
| Abstract Note | This book covers many advances in the subjects of nano-optics and nano photonics. The author describes the principle and technical schematics of common methods for breaking through the optical diffraction limit and focuses on realizing optical super-resolution with nonlinear effects of thin film materials. The applications of nonlinear optical super-resolution effects in nano-data storage, nanolithography, and nano-imaging are also presented. This book is useful to graduate students majoring in optics and nano science and also serves as a reference book for academic researchers, engineers, technical professionals in the fields of super-resolution optics and laser techniques, nano-optics and nano photonics, nano-data storage, nano imaging, micro/nanofabrication and nanolithography and nonlinear optics |
| ISBN,Price | 9783662444887 |
| Keyword(s) | 1. EBOOK
2. EBOOK - SPRINGER
3. Electronic materials
4. LASERS
5. Nanoscale science
6. Nanoscale Science and Technology
7. NANOSCIENCE
8. Nanostructures
9. NANOTECHNOLOGY
10. Nanotechnology and Microengineering
11. Optical and Electronic Materials
12. OPTICAL MATERIALS
13. Optics, Lasers, Photonics, Optical Devices
14. PHOTONICS
|
| Item Type | eBook |
Multi-Media Links
Please Click here for eBook
Circulation Data
| Accession# | |
Call# | Status | Issued To | Return Due On | Physical Location |
| I07633 |
|
|
On Shelf |
|
|
|
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